Tetra 30Plasma systems can be integrated in different forms, such asModule systemThe form.

In the following text, you can roughly understand what can be done withTetra 30The most common optional component used with plasma systems.

Tetra 30Plasma systems are mainly applied in the following fields:

• Analysis (REM, TEM)

• Archaeology

• Automotive industry

• Biotechnology

• Elastic body technology

• electronic technique

• electron microscope

• Precision Engineering

• research and development

• semiconductor technology

• Small batch production

• Plastic technology

• medical technology

• Microsystem Technology

• Solar cell technology

• Textile Technology

Basic equipment

• The specifications of the casing may vary depending on the specific components/optional parts

• Chamber volume: Depending on the specific version, it is divided into 34-57 liters

• Power supply: 230 V or 400 V/3 phase

Gas source

• Mass Flow Controllers (MFCs)

vacuum chamber

• Rectangular stainless steel parts with hinged doors
  (Approximately 305 mm wide, 300 mm high x 370 mm deep or 625 mm deep)

Loading components

• Product bracket (options: water-cooled), quartz glass boat, powder drum, bulk drum, aluminum plate, stainless steel plate, borosilicate glass, quartz glass

electrode

• Single layer or multi-layer

• RIE electrode with gas spray

Control system

• PCCE control system (Microsoft)Windows CE)

• PC Control System (Microsoft)Windows POS Ready 2009)

pressure measurement

• Pirani

• Baratron (for corrosive gas version)

timer

• Digital type

Generator

All generators are of the 0-100% continuously adjustable type

Vacuum pump

• Specifications and manufacturers vary (according to the needs of activated carbon filters)

Other options

Spare parts kit, pressure gauge, corrosive gas design structure, gas cylinder, pressure reducer, heating plate, temperature display, heating chamber Faraday Box、 Plasma polymerization accessories, testing ink, oxygen generator, slow ventilation device, slow suction device, TEM sample holder flange, maintenance/service, local language documents, on-site installation, including training. Other options available upon request.